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家园 他们自己主页上说已经有40nm了

40nm

SMIC is the first foundry in mainland China to offer 40nm technology. SMIC offers its 40nm Low Leakage (LL) process with three threshold voltage core devices and 1.8V, 2.5V I/O options to meet various design application requirements. The 40nm logic process combines the most advanced immersion lithography, strain engineering technique, ultra shallow junction and ultra low-k dielectric for maximum power and performance optimization.

Features:

Core device options: 1.1V (LL)

Three different Vt level core devices for flexible design optimization

I/O device options: 1.8V, 2.5V (pure) with over drive and under drive capability

Single-port and dual-port SRAM bit cells associated with memory compilers

193nm immersion lithography for critical layers

Strain technique to enhance mobility

Millisecond anneal for ultra shallow junction

Up to 10M Cu/Low-k (k = 2.7)

Wire bond and flip chip options

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